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Laser,Acoustic wave device,AlN,Annealing
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https://doi.org/10.1186/s13065-019-0550-6
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BMC Chemistry, https://doi.org/10.1186/s13065-019-0550-6
Laser
Acoustic wave device
AlN
Annealing
Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications
H. K. Lin
Y. J. Huang
W. C. Shih
Y. C. Chen
W. T. Chang
10.1186/s13065-019-0550-6
2010-04-23
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